Inventor · disambiguated record
Takehiko Senoo
Also filed as: SENOO TAKEHIKO
9 granted patents·2 pending applications·27 citations·filing 1995–2022
80Inventor score
Top patents by PatentIndex Score
11 records- 0169US9214364B2Substrate cleaning apparatus and vacuum processing systemDOBASHI KAZUYA·Filed 2012·Granted Dec 15, 2015·3 cites·13 claims
- 0263US12172198B2Gas cluster processing device and gas cluster processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Dec 24, 2024·0 cites·7 claims
- 0356US9159622B2Dividing method for waferDISCO CORP·Filed 2014·Granted Oct 13, 2015·1 cites·2 claims
- 0449US11267021B2Gas cluster processing device and gas cluster processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Mar 8, 2022·0 cites·6 claims
- 0549US5759334APlasma processing apparatusPLASMA SYSTEM CORP·Filed 1995·Granted Jun 2, 1998·23 cites·8 claims
- 0648US9533268B2Method and apparatus for supplying mixed gasIWATANI CORP·Filed 2014·Granted Jan 3, 2017·0 cites·8 claims
- 0746US8461051B2Cluster jet processing method, semiconductor element, microelectromechanical element, and optical componentKOIKE KUNIHIKO·Filed 2009·Granted Jun 11, 2013·0 cites·15 claims
- 0844US11380586B2Cutting methodIWATANI CORP·Filed 2018·Granted Jul 5, 2022·0 cites·12 claims
- 0942US11482455B2Cutting method of workpiece by forming reformed region and dry etching processIWATANI CORP·Filed 2018·Granted Oct 25, 2022·0 cites·2 claims
- 1039US2014061031A1Processing method utilizing clusterIWATANI CORP·Filed 2013·Application pending·0 cites
- 1135US2012071003A1Vacuum Processing Apparatus, Vacuum Processing Method, and Micro-Machining ApparatusDOBASHI KAZUYA·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →