Inventor · disambiguated record
Samuel K. Doran
Also filed as: DORAN SAMUEL K · DORAN SAMUEL KAY
15 granted patents·352 citations·filing 1974–2001
94Inventor score
Top patents by PatentIndex Score
15 records- 0193US4818885AElectron beam writing method and system using large range deflection in combination with a continuously moving tableIBM·Filed 1987·Granted Apr 4, 1989·79 cites·7 claims
- 0284US4468565AAutomatic focus and deflection correction in E-beam system using optical target height measurementsIBM·Filed 1981·Granted Aug 28, 1984·29 cites·11 claims
- 0380US6456019B1Real time measurement of leakage current in high voltage electron gunsNIKON CORP·Filed 2001·Granted Sep 24, 2002·15 cites·29 claims
- 0480US5140242AServo guided stage systemIBM·Filed 1990·Granted Aug 18, 1992·71 cites·23 claims
- 0579US5585629AElectron beam nano-metrology systemIBM·Filed 1996·Granted Dec 17, 1996·36 cites·11 claims
- 0678US6590216B1Servo control for high emittance electron sourceNIKON CORP·Filed 2000·Granted Jul 8, 2003·14 cites·20 claims
- 0776US5716742AReal time alignment system for a projection electron beam lithographic systemIBM·Filed 1996·Granted Feb 10, 1998·26 cites·30 claims
- 0868US5548195ACompensated servo control stage positioning apparatusIBM·Filed 1994·Granted Aug 20, 1996·29 cites·9 claims
- 0961US6466324B1Servo guided stage system with yaw sensorIBM·Filed 2000·Granted Oct 15, 2002·10 cites·10 claims
- 1060US4066863AMethod and system for automatically correcting aberrations of a beam of charged particlesIBM·Filed 1974·Granted Jan 3, 1978·8 cites·57 claims
- 1157US4568861AMethod and apparatus for controlling alignment and brightness of an electron beamIBM·Filed 1983·Granted Feb 4, 1986·9 cites·14 claims
- 1254US4137459AMethod and apparatus for applying focus correction in E-beam systemIBM·Filed 1978·Granted Jan 30, 1979·8 cites·3 claims
- 1345US6388516B1Precision high speed magnetic coil driver circuitIBM·Filed 2000·Granted May 14, 2002·4 cites·14 claims
- 1439US5739654APrecision tool control system for a workpiece positioning apparatusIBM·Filed 1996·Granted Apr 14, 1998·11 cites·9 claims
- 1532US5648188AReal time alignment system for a projection electron beam lithographic systemIBM·Filed 1995·Granted Jul 15, 1997·3 cites·16 claims
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