Inventor · disambiguated record
Franz Kumnig
Also filed as: KUMNIG FRANZ
7 granted patents·1 pending application·17 citations·filing 2010–2019
79Inventor score
Top patents by PatentIndex Score
8 records- 0180US8646767B2Device for holding wafer shaped articlesKUMNIG FRANZ·Filed 2010·Granted Feb 11, 2014·8 cites·15 claims
- 0277US11195730B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2019·Granted Dec 7, 2021·2 cites·10 claims
- 0373US8490634B2Device for treating disc-like articlesOBWEGER RAINER·Filed 2010·Granted Jul 23, 2013·3 cites·16 claims
- 0470US8833380B2Device for treating disc-like articlesOBWEGER RAINER·Filed 2011·Granted Sep 16, 2014·2 cites·11 claims
- 0561US10490426B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2014·Granted Nov 26, 2019·1 cites·29 claims
- 0658US9633890B2Device for treating surfaces of wafer-shaped articles and gripping pin for use in the deviceTSCHINDERLE ULRICH·Filed 2011·Granted Apr 25, 2017·1 cites·18 claims
- 0748US2013233356A1Process and apparatus for treating surfaces of wafer-shaped articlesOBWEGER RAINER·Filed 2012·Application pending·0 cites
- 0840US8668777B2Process for treating a semiconductor waferOKORN-SCHMIDT HARALD·Filed 2010·Granted Mar 11, 2014·0 cites·20 claims
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