Inventor · disambiguated record
Jin Fujihara
Also filed as: FUJIHARA JIN
4 granted patents·1 pending application·353 citations·filing 2006–2013
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0194US8741065B2Substrate processing apparatusODAGIRI MASAYA·Filed 2011·Granted Jun 3, 2014·343 cites·9 claims
- 0274US7416676B2Plasma etching method and apparatus, control program for performing the etching method, and storage medium storing the control programTOKYO ELECTRON LTD·Filed 2006·Granted Aug 26, 2008·6 cites·10 claims
- 0364US8394720B2Plasma processing method and resist pattern modifying methodFUJIHARA JIN·Filed 2009·Granted Mar 12, 2013·4 cites·19 claims
- 0438US2015113826A1Substrate placing table and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0535US9153465B2Substrate stage, substrate processing apparatus and substrate processing systemODAGIRI MASAYA·Filed 2011·Granted Oct 6, 2015·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →