Inventor · disambiguated record

Arpan P. Mahorowila

Also filed as: MAHOROWALA ARPAN P · MAHOROWILA ARPAN P

2 granted patents·17 citations·filing 2003–2005

58Inventor score

Technology areasG03F Y10S

Files withIBM2

Top patents by PatentIndex Score

2 records

0167US7276327B2Silicon-containing compositions for spin-on arc/hardmask materialsIBM·Filed 2005·Granted Oct 2, 2007·2 cites·16 claims
0263US7270931B2Silicon-containing compositions for spin-on ARC/hardmask materialsIBM·Filed 2003·Granted Sep 18, 2007·15 cites·9 claims

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