Inventor · disambiguated record
Tomoki Suemasa
Also filed as: SUEMASA TOMOKI
6 granted patents·3 pending applications·321 citations·filing 1997–2014
84Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
9 records- 0197US6089181APlasma processing apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Jul 18, 2000·201 cites·12 claims
- 0296US6642149B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2002·Granted Nov 4, 2003·92 cites·18 claims
- 0375US6670276B1Plasma processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Dec 30, 2003·19 cites·3 claims
- 0474US9384993B2Oxide etching methodTOKYO ELECTRON LTD·Filed 2014·Granted Jul 5, 2016·3 cites·6 claims
- 0554US7326650B2Method of etching dual damascene structureTOKYO ELECTRON LTD·Filed 2001·Granted Feb 5, 2008·6 cites·25 claims
- 0642US9418866B2Gas treatment methodTOKYO ELECTRON LTD·Filed 2013·Granted Aug 16, 2016·0 cites·5 claims
- 0737US2004173573A1Oxide film etching methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 0836US2003102087A1Plasma processing apparatus and processing methodFiled 2002·Application pending·0 cites
- 0932US2002055263A1Oxide film etching methodFiled 2001·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →