Inventor · disambiguated record
Rinshi Sugino
Also filed as: SUGINO RINSHI
3 granted patents·195 citations·filing 1991–1992
77Inventor score
Technology areasH10P
Files withFUJITSU LTD3
Top patents by PatentIndex Score
3 records- 0181US5225355AGettering treatment processFUJITSU LTD·Filed 1992·Granted Jul 6, 1993·91 cites·26 claims
- 0280US5221423AProcess for cleaning surface of semiconductor substrateFUJITSU LTD·Filed 1991·Granted Jun 22, 1993·80 cites·5 claims
- 0350US5178721AProcess and apparatus for dry cleaning by photo-excited radicalsFUJITSU LTD·Filed 1991·Granted Jan 12, 1993·24 cites·19 claims
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