Inventor · disambiguated record

Junfong Li

Also filed as: LI JUNFONG

1 granted patent·2 citations·filing 2011–2011

18Inventor score

Technology areasH10P

Files withYANG TAO1

Top patents by PatentIndex Score

1 record

0163US8409986B2Method for improving within die uniformity of metal plug chemical mechanical planarization process in gate last routeYANG TAO·Filed 2011·Granted Apr 2, 2013·2 cites·10 claims

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