Inventor · disambiguated record
Libor Vyklicky
Also filed as: VYKLICKY LIBOR
16 granted patents·6 pending applications·60 citations·filing 2006–2022
91Inventor score
Top patents by PatentIndex Score
22 records- 0193US7588879B2Graded spin-on organic antireflective coating for photolithographyIBM·Filed 2008·Granted Sep 15, 2009·15 cites·24 claims
- 0289US8546062B2Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using sameHUANG WU-SONG·Filed 2011·Granted Oct 1, 2013·7 cites·16 claims
- 0387US8293451B2Near-infrared absorbing film compositionsGLODDE MARTIN·Filed 2009·Granted Oct 23, 2012·8 cites·17 claims
- 0485US8137874B2Organic graded spin on BARC compositions for high NA lithographyGOLDFARB DARIO L·Filed 2008·Granted Mar 20, 2012·7 cites·12 claims
- 0585US7816069B2Graded spin-on organic antireflective coating for photolithographyIBM·Filed 2006·Granted Oct 19, 2010·7 cites·8 claims
- 0680US8097401B2Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using sameHUANG WU-SONG·Filed 2009·Granted Jan 17, 2012·4 cites·14 claims
- 0779US9465290B2Near-infrared absorbing film compositionsGLOBALFOUNDRIES INC·Filed 2014·Granted Oct 11, 2016·2 cites·8 claims
- 0879US8182978B2Developable bottom antireflective coating compositions especially suitable for ion implant applicationsHUANG WU-SONG·Filed 2009·Granted May 22, 2012·4 cites·21 claims
- 0976US8652762B2Organic graded spin on BARC compositions for high NA lithographyGOLDFARB DARIO L·Filed 2012·Granted Feb 18, 2014·2 cites·10 claims
- 1075US8772376B2Near-infrared absorbing film compositionsHUANG WU-SONG·Filed 2009·Granted Jul 8, 2014·3 cites·13 claims
- 1165US9726977B2Coating compositions suitable for use with an overcoated photoresistCAMERON JAMES F·Filed 2010·Granted Aug 8, 2017·1 cites·8 claims
- 1255US8586283B2Near-infrared absorbing film compositionsGLODDE MARTIN·Filed 2012·Granted Nov 19, 2013·0 cites·17 claims
- 1355US8557501B2Developable bottom antireflective coating compositions especially suitable for ion implant applicationsHUANG WU-SONG·Filed 2012·Granted Oct 15, 2013·0 cites·16 claims
- 1454US2011300483A1Self-Segregating Multilayer Imaging Stack With Built-In Antireflective PropertiesCHENG JOY·Filed 2011·Application pending·0 cites
- 1554US2011294068A1Self-Segregating Multilayer Imaging Stack With Built-In Antireflective PropertiesCHENG JOY·Filed 2011·Application pending·0 cites
- 1654US2025154128A1A process for making osimertinibSYNTHON BV·Filed 2022·Application pending·0 cites
- 1750US2024092785A1Process for making ibrutinibSYNTHON BV·Filed 2022·Application pending·0 cites
- 1849US9981965B2Process for preparing idelalisibSYNTHON BV·Filed 2016·Granted May 29, 2018·0 cites·17 claims
- 1947US11390593B2Process for preparing ozanimodSYNTHON BV·Filed 2019·Granted Jul 19, 2022·0 cites·26 claims
- 2041US2009093114A1Method of forming a dual-damascene structure using an underlayerBURNS SEAN DAVID·Filed 2007·Application pending·0 cites
- 2139US2019144452A1Process for preparing idelalisibSYNTHON BV·Filed 2018·Application pending·0 cites
- 2232US9012133B2Removal of alkaline crystal defects in lithographic patterningPEREZ JAVIER J·Filed 2011·Granted Apr 21, 2015·0 cites·21 claims
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