Inventor · disambiguated record
Tsunehiko Nakamura
Also filed as: NAKAMURA TSUNEHIKO
10 granted patents·3 pending applications·286 citations·filing 1995–2010
90Inventor score
Top patents by PatentIndex Score
13 records- 0195US7417206B2Heater, wafer heating apparatus and method for manufacturing heaterKYOCERA CORP·Filed 2005·Granted Aug 26, 2008·63 cites·10 claims
- 0294US7361865B2Heater for heating a wafer and method for fabricating the sameKYOCERA CORP·Filed 2005·Granted Apr 22, 2008·160 cites·30 claims
- 0388US7457098B2Electrostatic chuckKYOCERA CORP·Filed 2007·Granted Nov 25, 2008·13 cites·11 claims
- 0486US8519309B2Wafer heating apparatus and semiconductor manufacturing apparatusIWATA KEIJI·Filed 2010·Granted Aug 27, 2013·8 cites·19 claims
- 0585US8071916B2Wafer heating apparatus and semiconductor manufacturing apparatusIWATA KEIJI·Filed 2005·Granted Dec 6, 2011·11 cites·22 claims
- 0677US7646580B2Electrostatic chuck and wafer holding member and wafer treatment methodKYOCERA CORP·Filed 2006·Granted Jan 12, 2010·6 cites·18 claims
- 0766US6914222B2Wafer heating apparatusKYOCERA CORP·Filed 2003·Granted Jul 5, 2005·11 cites·6 claims
- 0861US7248456B2Electrostatic chuckKYOCERA CORP·Filed 2004·Granted Jul 24, 2007·7 cites·11 claims
- 0942US2008017632A1Heater For Heating a Wafer and Method For Fabricating The SameKYOCERA CORP·Filed 2007·Application pending·0 cites
- 1041US5648303ANon-magnetic ceramics for recording/reproducing heads and method of producing the sameKYOCERA CORP·Filed 1995·Granted Jul 15, 1997·7 cites·13 claims
- 1139US2006000822A1Ceramic heater, wafer heating device using thereof and method for manufacturing a semiconductor substrateKYOCERA CORP·Filed 2005·Application pending·0 cites
- 1239US2005215073A1Wafer supporting memberKYOCERA CORP·Filed 2005·Application pending·0 cites
- 1328US8956459B2Joined assembly, wafer holding assembly, attaching structure thereof and method for processing waferNAKAMURA TSUNEHIKO·Filed 2006·Granted Feb 17, 2015·0 cites·19 claims
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