Inventor · disambiguated record
Takara Kato
Also filed as: KATO TAKARA
2 granted patents·4 pending applications·12 citations·filing 2010–2012
56Inventor score
Top patents by PatentIndex Score
6 records- 0187US8399353B2Methods of forming copper wiring and copper film, and film forming systemISHIZAKA TADAHIRO·Filed 2011·Granted Mar 19, 2013·9 cites·13 claims
- 0273US8859422B2Method of forming copper wiring and method and system for forming copper filmISHIZAKA TADAHIRO·Filed 2012·Granted Oct 14, 2014·3 cites·26 claims
- 0340US2013237053A1Film forming method and film forming apparatusISHIZAKA TADAHIRO·Filed 2011·Application pending·0 cites
- 0439US2013252417A1Thin film forming methodISHIZAKA TADAHIRO·Filed 2012·Application pending·0 cites
- 0536US2012064717A1Method for forming cvd-ru film and method for manufacturing semiconductor devicesKATO TAKARA·Filed 2011·Application pending·0 cites
- 0634US2012222782A1METHOD FOR FORMING Cu WIRINGGOMI ATSUSHI·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →