Inventor · disambiguated record
Johannes Onvlee
Also filed as: ONVLEE JOHANNES
43 granted patents·8 pending applications·166 citations·filing 1993–2022
97Inventor score
Files withASML NETHERLANDS BV34ASML HOLDING NV6ONVLEE JOHANNES3VAN ZWET ERWIN JOHN3DE JAGER PIETER WILLEM HERMAN2
Top patents by PatentIndex Score
51 records- 0197US9335638B2Lithographic apparatus, programmable patterning device and lithographic methodASML NETHERLANDS BV·Filed 2013·Granted May 10, 2016·19 cites·24 claims
- 0294US8531648B2Lithographic apparatus, programmable patterning device and lithographic methodDE JAGER PIETER WILLEM HERMAN·Filed 2009·Granted Sep 10, 2013·25 cites·34 claims
- 0388US9632434B2Reticle cooling system in a lithographic apparatusASML HOLDING NV·Filed 2015·Granted Apr 25, 2017·3 cites·20 claims
- 0488US7352439B2Lithography system, control system and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 1, 2008·10 cites·16 claims
- 0587US7511797B2Lithography system, control system and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Mar 31, 2009·9 cites·20 claims
- 0682US7714981B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2006·Granted May 11, 2010·5 cites·16 claims
- 0782US7633600B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 15, 2009·6 cites·16 claims
- 0881US9632433B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2013·Granted Apr 25, 2017·2 cites·9 claims
- 0981US7433033B2Inspection method and apparatus using sameASML NETHERLANDS BV·Filed 2006·Granted Oct 7, 2008·7 cites·15 claims
- 1080US11994848B2Systems and methods for adjusting prediction models between facility locationsASML NETHERLANDS BV·Filed 2020·Granted May 28, 2024·2 cites·20 claims
- 1178US9766557B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted Sep 19, 2017·1 cites·13 claims
- 1275US9696633B2Substrate handling apparatus and lithographic apparatusONVLEE JOHANNES·Filed 2011·Granted Jul 4, 2017·4 cites·21 claims
- 1374US12032301B2Substrate support, lithographic apparatus and loading methodASML NETHERLANDS BV·Filed 2022·Granted Jul 9, 2024·0 cites·20 claims
- 1473US7630118B2Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 8, 2009·13 cites·37 claims
- 1571US7195407B2Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer programASML NETHERLANDS BV·Filed 2006·Granted Mar 27, 2007·10 cites·12 claims
- 1669US9645502B2Lithographic apparatus, programmable patterning device and lithographic methodDE JAGER PIETER WILLEM HERMAN·Filed 2012·Granted May 9, 2017·1 cites·21 claims
- 1766US9134630B2Lithographic apparatus and device manufacturing methodVAN ZWET ERWIN JOHN·Filed 2011·Granted Sep 15, 2015·1 cites·20 claims
- 1866US7349082B2Particle detection device, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 25, 2008·5 cites·24 claims
- 1965US7283225B2Particle detection device, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 16, 2007·2 cites·35 claims
- 2064US7068351B2Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer programASML NETHERLANDS BV·Filed 2004·Granted Jun 27, 2006·8 cites·31 claims
- 2163US9316926B2Lithographic apparatus and device manufacturing methodVAN ZWET ERWIN JOHN·Filed 2011·Granted Apr 19, 2016·1 cites·18 claims
- 2263US7933000B2Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning deviceASML NETHERLANDS BV·Filed 2006·Granted Apr 26, 2011·1 cites·13 claims
- 2361US9977351B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted May 22, 2018·0 cites·14 claims
- 2458US12442759B2Contaminant analyzing metrology system, lithographic apparatus, and methods thereofASML HOLDING NV·Filed 2021·Granted Oct 14, 2025·0 cites·21 claims
- 2558US8636458B2Integrated post-exposure bake trackAUER-JONGEPIER SUZAN L·Filed 2007·Granted Jan 28, 2014·2 cites·21 claims
- 2658US8576374B2Lithographic apparatus and methodBEST KEITH FRANK·Filed 2009·Granted Nov 5, 2013·3 cites·6 claims
- 2755US7184849B2Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer programASML NETHERLANDS BV·Filed 2004·Granted Feb 27, 2007·7 cites·34 claims
- 2854US11556063B2Substrate support, lithographic apparatus and loading methodASML NETHERLANDS BV·Filed 2017·Granted Jan 17, 2023·0 cites·20 claims
- 2954US7123349B2Lithographic projection assembly, substrate handling apparatus and substrate handling methodASML NETHERLANDS BV·Filed 2004·Granted Oct 17, 2006·5 cites·18 claims
- 3054US2015212432A1Reticle Heater to Keep Reticle Heating UniformASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
- 3152US9372412B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 21, 2016·0 cites·20 claims
- 3251US8947641B2Lithographic apparatus and methodONVLEE JOHANNES·Filed 2007·Granted Feb 3, 2015·0 cites·20 claims
- 3351US8345225B2Controllable radiation lithographic apparatus and methodASML NETHERLANDS BV·Filed 2009·Granted Jan 1, 2013·0 cites·33 claims
- 3450US2010060869A1Lithographic apparatus and alignment methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 3549US2010178612A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 3648US7679714B2Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 16, 2010·0 cites·12 claims
- 3747US7756597B2Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer programASML NETHERLANDS BV·Filed 2004·Granted Jul 13, 2010·4 cites·20 claims
- 3846US2015192856A1Heating and Cooling Systems in a Lithographic ApparatusASML NETHERLANDS BV·Filed 2015·Application pending·0 cites
- 3944US10423081B2Reticle cooling by non-uniform gas flowASML HOLDING NV·Filed 2015·Granted Sep 24, 2019·0 cites·24 claims
- 4044US7817241B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Oct 19, 2010·0 cites·22 claims
- 4144US5452408AMethod of assigning a pertinent indication in respect of color behavior to a picture element to be imaged with a color reproduction systemOCE NEDERLAND BV·Filed 1993·Granted Sep 19, 1995·10 cites·20 claims
- 4243US10031428B2Gas flow optimization in reticle stage environmentASML NETHERLANDS BV·Filed 2014·Granted Jul 24, 2018·0 cites·38 claims
- 4343US2009075012A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 4443US2024062356A1Data-driven prediction and identification of failure modes based on wafer-level analysis and root cause analysis for semiconductor processingASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 4542US9235140B2Lithographic apparatus and device manufacturing methodVAN ZWET ERWIN JOHN·Filed 2011·Granted Jan 12, 2016·0 cites·20 claims
- 4642US9041911B2Lithographic apparatus and device manufacturing methodONVLEE JOHANNES·Filed 2011·Granted May 26, 2015·0 cites·20 claims
- 4741US2015241797A1Reticle Cleaning by Means of Sticky SurfaceASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
- 4839US10444647B2Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrateASML NETHERLANDS BV·Filed 2017·Granted Oct 15, 2019·0 cites·20 claims
- 4936US10459354B2Lithographic apparatus and lithographic projection methodASML NETHERLANDS BV·Filed 2016·Granted Oct 29, 2019·0 cites·20 claims
- 5035US9857694B2Estimating deformation of a patterning device and/or a change in its positionASML NETHERLANDS BV·Filed 2015·Granted Jan 2, 2018·0 cites·25 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
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