Inventor · disambiguated record
Bart Dinand Paarhuis
Also filed as: PAARHUIS BART DINAND
8 granted patents·10 citations·filing 2006–2018
77Inventor score
Technology areasG03F
Top patents by PatentIndex Score
8 records- 0189US9989858B2Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrateASML NETHERLANDS BV·Filed 2014·Granted Jun 5, 2018·5 cites·20 claims
- 0283US9081311B2Lithographic apparatus and device manufacturing methodVOGEL HERMAN·Filed 2012·Granted Jul 14, 2015·5 cites·20 claims
- 0360US10444632B2Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrateASML NETHERLANDS BV·Filed 2018·Granted Oct 15, 2019·0 cites·20 claims
- 0455US7963144B2Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing systemASML NETHERLANDS BV·Filed 2009·Granted Jun 21, 2011·0 cites·7 claims
- 0550US7624617B2Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing systemASML NETHERLANDS BV·Filed 2006·Granted Dec 1, 2009·0 cites·7 claims
- 0642US8810769B2Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatusGOSEN JEROEN GERARD·Filed 2011·Granted Aug 19, 2014·0 cites·20 claims
- 0736US11762304B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 19, 2023·0 cites·22 claims
- 0836US10459354B2Lithographic apparatus and lithographic projection methodASML NETHERLANDS BV·Filed 2016·Granted Oct 29, 2019·0 cites·20 claims
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