Inventor · disambiguated record
Vsevolod Zelenkov
Also filed as: ZELENKOV VSEVOLOD · ZELENKOV VSEVOLOD V
4 granted patents·27 citations·filing 2002–2004
73Inventor score
Technology areasH01J
Files withVEECO INSTR INC4
Top patents by PatentIndex Score
4 records- 0179US6919690B2Modular uniform gas distribution system in an ion sourceVEECO INSTR INC·Filed 2004·Granted Jul 19, 2005·16 cites·22 claims
- 0265US6984942B2Longitudinal cathode expansion in an ion sourceVEECO INSTR INC·Filed 2004·Granted Jan 10, 2006·6 cites·16 claims
- 0357US7718983B2Sputtered contamination shielding for an ion sourceVEECO INSTR INC·Filed 2004·Granted May 18, 2010·3 cites·50 claims
- 0445US6864486B2Ion sourcesVEECO INSTR INC·Filed 2002·Granted Mar 8, 2005·2 cites·31 claims
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