Inventor · disambiguated record
Peter Lokai
Also filed as: LOKAI PETER
20 granted patents·1 pending application·522 citations·filing 1988–2003
96Inventor score
Files withLAMBDA PHYSIK AG13LAMBDA PHYSIK GMBH6LAMBDA PHYSIK FORSCHUNG1LAMBDA PHYSIK GESSELLSCHAFT ZU1
Top patents by PatentIndex Score
21 records- 0194US6580517B2Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lampLAMBDA PHYSIK AG·Filed 2001·Granted Jun 17, 2003·61 cites·20 claims
- 0293US4905243AMethod and apparatus for stabilizing the frequency of a laser beamLAMBDA PHYSIK FORSCHUNG·Filed 1988·Granted Feb 27, 1990·79 cites·11 claims
- 0390US6421365B1Narrow band excimer or molecular fluorine laser having an output coupling interferometerLAMBDA PHYSIK AG·Filed 2000·Granted Jul 16, 2002·27 cites·52 claims
- 0489US6272158B1Method and apparatus for wavelength calibrationLAMBDA PHYSIK AG·Filed 2000·Granted Aug 7, 2001·24 cites·39 claims
- 0586US6160832AMethod and apparatus for wavelength calibrationLAMBDA PHYSIK GMBH·Filed 1999·Granted Dec 12, 2000·52 cites·17 claims
- 0681US6608848B2Method and apparatus for wavelength calibrationLAMBDA PHYSIK AG·Filed 2001·Granted Aug 19, 2003·14 cites·43 claims
- 0781US5663973ATunable narrowband source of a coherent radiationLAMBDA PHYSIK GMBH·Filed 1996·Granted Sep 2, 1997·73 cites·12 claims
- 0880US6856638B2Resonator arrangement for bandwidth controlLAMBDA PHYSIK AG·Filed 2001·Granted Feb 15, 2005·20 cites·47 claims
- 0975US6792023B1Method and apparatus for reduction of spectral fluctuationsLAMBDA PHYSIK AG·Filed 2002·Granted Sep 14, 2004·13 cites·35 claims
- 1075US5659419ATunable narrowband optical parametrical oscillatorLAMBDA PHYSIK GMBH·Filed 1995·Granted Aug 19, 1997·50 cites·9 claims
- 1171US6516012B2Narrow band excimer or molecular fluorine laser having an output coupling interferometerLAMBDA PHYSIK AG·Filed 2002·Granted Feb 4, 2003·8 cites·15 claims
- 1269US6839375B1On-line quality control of the key optical components in lithography lasers using laser induced fluorescenceLAMBDA PHYSIK AG·Filed 2002·Granted Jan 4, 2005·13 cites·56 claims
- 1367US6717973B2Wavelength and bandwidth monitor for excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Apr 6, 2004·8 cites·84 claims
- 1464US6553050B1Narrow band excimer or molecular fluorine laser having an output coupling interferometerLAMBDA PHYSIK AG·Filed 2002·Granted Apr 22, 2003·7 cites·30 claims
- 1562US5671241ATunable source of narrowband coherent radiationLAMBDA PHYSIK GMBH·Filed 1996·Granted Sep 23, 1997·27 cites·6 claims
- 1653US6567451B2Narrow band excimer or molecular fluorine laser having an output coupling interferometerLAMBDA PHYSIK AG·Filed 2002·Granted May 20, 2003·2 cites·34 claims
- 1748US5661595ATunable, optical parametric oscillatorLAMBDA PHYSIK GMBH·Filed 1996·Granted Aug 26, 1997·16 cites·9 claims
- 1847US7006541B2Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lampLAMBDA PHYSIK AG·Filed 2003·Granted Feb 28, 2006·1 cites·8 claims
- 1943US5796513ALaser arrangement for generating narrow-band, tunable coherent radiationLAMBDA PHYSIK GMBH·Filed 1996·Granted Aug 18, 1998·15 cites·9 claims
- 2038US5896220AProduction of narrow-band coherent radiation by using at least one optical parametric oscillatorLAMBDA PHYSIK GESSELLSCHAFT ZU·Filed 1997·Granted Apr 20, 1999·12 cites·14 claims
- 2137US2003161374A1High-resolution confocal Fabry-Perot interferometer for absolute spectral parameter detection of excimer laser used in lithography applicationsLAMBDA PHYSIK AG·Filed 2002·Application pending·0 cites
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