Inventor · disambiguated record
Margret Harms
Also filed as: HARMS MARGRET
7 granted patents·91 citations·filing 1981–1989
86Inventor score
Files withPHILIPS CORP7
Top patents by PatentIndex Score
7 records- 0169US4994141AMethod of manufacturing a mask support of SiC for radiation lithography masksPHILIPS CORP·Filed 1989·Granted Feb 19, 1991·22 cites·27 claims
- 0266US4941942AMethod of manufacturing a mask support of sic for x-ray lithography masksPHILIPS CORP·Filed 1988·Granted Jul 17, 1990·20 cites·16 claims
- 0366US4468799ARadiation lithography mask and method of manufacturing samePHILIPS CORP·Filed 1982·Granted Aug 28, 1984·19 cites·4 claims
- 0460US4386114AMethod of manufacturing a thin-film magnetic field sensorPHILIPS CORP·Filed 1981·Granted May 31, 1983·12 cites·10 claims
- 0541US4606803AMethod of manufacturing a mask for the production of patterns in lacquer layers by means of X-ray lithographyPHILIPS CORP·Filed 1984·Granted Aug 19, 1986·7 cites·9 claims
- 0637US4946751AMethod of manufacturing a mask for radiation lithographyPHILIPS CORP·Filed 1988·Granted Aug 7, 1990·5 cites·47 claims
- 0737US4555460AMask for the formation of patterns in lacquer layers by means of X-ray lithography and method of manufacturing samePHILIPS CORP·Filed 1983·Granted Nov 26, 1985·6 cites·6 claims
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