Inventor · disambiguated record
Luigi Scaccabarozzi
Also filed as: SCACCABAROZZI LUIGI
12 granted patents·10 pending applications·50 citations·filing 2009–2019
88Inventor score
Files withASML NETHERLANDS BV7SCACCABAROZZI LUIGI3ASML HOLDING NV1BANINE VADIM YEVGENYEVICH1DEN BOEF ARIE JEFFREY1
Top patents by PatentIndex Score
22 records- 0197US10228615B2Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membraneASML NETHERLANDS BV·Filed 2015·Granted Mar 12, 2019·17 cites·28 claims
- 0296US10698312B2Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membraneASML NETHERLANDS BV·Filed 2019·Granted Jun 30, 2020·8 cites·23 claims
- 0387US10139725B2Lithographic apparatusASML NETHERLANDS BV·Filed 2014·Granted Nov 27, 2018·6 cites·24 claims
- 0484US9606445B2Lithographic apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·5 cites·21 claims
- 0579US10678140B2Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filterASML NETHERLANDS BV·Filed 2016·Granted Jun 9, 2020·3 cites·7 claims
- 0676US9298110B2Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a deviceSTEINHOFF JENS ARNO·Filed 2011·Granted Mar 29, 2016·6 cites·19 claims
- 0772US8477285B2Particle cleaning of optical elements for microlithographyEHM DIRK HEINRICH·Filed 2010·Granted Jul 2, 2013·3 cites·25 claims
- 0854US9563137B2Lithographic apparatus and device manufacturing methodLAMMERS NICOLAAS ARNOLDUS·Filed 2010·Granted Feb 7, 2017·2 cites·18 claims
- 0952US2010165310A1EUV Mask InspectionASML HOLDING NV·Filed 2009·Application pending·0 cites
- 1047US2011037960A1Lithographic apparatus, device manufacturing method, cleaning system and method for cleaning a patterning deviceASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 1146US8830455B2Inspection method and apparatusDEN BOEF ARIE JEFFREY·Filed 2010·Granted Sep 9, 2014·0 cites·19 claims
- 1240US2012182538A1Methods and Apparatus for Inspection Of Articles, EUV Lithography Reticles, Lithography Apparatus and Method of Manufacturing DevicesKOOLE ROELOF·Filed 2011·Application pending·0 cites
- 1339US8405825B2Method of detecting a particle and a lithographic apparatusSCACCABAROZZI LUIGI·Filed 2010·Granted Mar 26, 2013·0 cites·12 claims
- 1439US2012081684A1Object Inspection Systems and MethodsDEN OEF ARIE JEFFREY·Filed 2010·Application pending·0 cites
- 1538US2014002805A1Electrostatic Clamp Apparatus And Lithographic ApparatusBANINE VADIM YEVGENYEVICH·Filed 2012·Application pending·0 cites
- 1637US2011170083A1Lithographic Apparatus and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 1737US2014014138A1Gas-liquid phase transition method and apparatus for cleaning of surfaces in semiconductor manufacturingSPIEGELMAN JEFFREY J·Filed 2011·Application pending·0 cites
- 1837US2010151394A1System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing MethodSCACCABAROZZI LUIGI·Filed 2009·Application pending·0 cites
- 1936US9488922B2Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devicesVAINER YURI·Filed 2011·Granted Nov 8, 2016·0 cites·20 claims
- 2033US9122178B2Object inspection systems and methodsIVANOV VITALII·Filed 2010·Granted Sep 1, 2015·0 cites·14 claims
- 2133US2014340663A1Apparatus for Monitoring a Lithographic Patterning DeviceSCACCABAROZZI LUIGI·Filed 2012·Application pending·0 cites
- 2231US2013070218A1System for removing contaminant particles, lithographic apparatus, method for removing contaminant particles and method for manufacturing a deviceIVANOV VLADIMIR VITALEVICH·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →