Inventor · disambiguated record
Nils Haverkamp
Also filed as: HAVERKAMP NILS
38 granted patents·5 pending applications·99 citations·filing 2008–2025
96Inventor score
Files withZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH33ZEISS CARL SMT GMBH4ZEISS CARL AG2SCHOLZ AXEL1WOLF OLIVER1
Top patents by PatentIndex Score
43 records- 0196US11104064B2Method and arrangement for producing a workpiece by using additive manufacturing techniquesZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2020·Granted Aug 31, 2021·4 cites·10 claims
- 0296US10220566B2Method and arrangement for producing a workpiece by using additive manufacturing techniquesZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2014·Granted Mar 5, 2019·24 cites·19 claims
- 0395US10532513B2Method and arrangement for producing a workpiece by using additive manufacturing techniquesZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2019·Granted Jan 14, 2020·9 cites·20 claims
- 0494US11725929B2Pose measurement in a positioning apparatusZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2021·Granted Aug 15, 2023·3 cites·21 claims
- 0594US10706562B2Motion-measuring system of a machine and method for operating the motion-measuring systemZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Jul 7, 2020·15 cites·9 claims
- 0690US11041799B2Device for 3D measurement of object coordinatesZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2020·Granted Jun 22, 2021·2 cites·10 claims
- 0789US11371828B2Coordinate measuring machine and method for measuring coordinates of a workpieceZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2021·Granted Jun 28, 2022·2 cites·9 claims
- 0889US10415955B2Measuring systemZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Sep 17, 2019·5 cites·16 claims
- 0988US10748300B2Target body, arrangement including a target body, and method for determining a position and/or an alignment of a target bodyZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2019·Granted Aug 18, 2020·4 cites·21 claims
- 1085US11423566B2Variable measuring object dependent camera setup and calibration thereofZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2019·Granted Aug 23, 2022·5 cites·21 claims
- 1184US9280060B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2014·Granted Mar 8, 2016·5 cites·28 claims
- 1278US11813791B2Method and system for producing a workpiece using additive manufacturing techniquesZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2021·Granted Nov 14, 2023·0 cites·20 claims
- 1378US8873023B2Illumination system for microlithographySCHOLZ AXEL·Filed 2011·Granted Oct 28, 2014·4 cites·12 claims
- 1477US7880969B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Feb 1, 2011·4 cites·20 claims
- 1574US10120163B2Auto-focus method for a coordinate-measuring apparatusZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Nov 6, 2018·2 cites·21 claims
- 1673US9846026B2Light-emitting table suitable for use in metrology, and coordinate measuring machine having such a light-emitting tableZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2016·Granted Dec 19, 2017·2 cites·14 claims
- 1770US9606441B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2016·Granted Mar 28, 2017·1 cites·20 claims
- 1869US9857164B2Lens device for a variable working distance, illumination assembly, coordinate measuring machine and methodZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Jan 2, 2018·1 cites·22 claims
- 1969US8520307B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusWOLF OLIVER·Filed 2010·Granted Aug 27, 2013·4 cites·48 claims
- 2068US10360684B2Method and apparatus for edge determination of a measurement object in optical metrologyZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Jul 23, 2019·1 cites·8 claims
- 2167US12064868B2Joint for connecting two joint elements, and method for operating a jointZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2022·Granted Aug 20, 2024·0 cites·17 claims
- 2265US10345101B2Device and method for calibrating a coordinate-measuring deviceZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2013·Granted Jul 9, 2019·2 cites·22 claims
- 2365US2025305951A1Method and system for determining a pose, and method for producing a diffractive optical elementZEISS CARL AG·Filed 2025·Application pending·0 cites
- 2460US12369989B2Medical apparatus for determining the relative spatial position of a planar markerZEISS CARL MEDITEC AG·Filed 2022·Granted Jul 29, 2025·0 cites·18 claims
- 2557US10088754B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2017·Granted Oct 2, 2018·0 cites·19 claims
- 2656US11504855B2System, method and marker for the determination of the position of a movable object in spaceZEISS CARL SMT GMBH·Filed 2019·Granted Nov 22, 2022·0 cites·23 claims
- 2754US12248065B2Optical device for determining a distance of a measurement objectZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2021·Granted Mar 11, 2025·0 cites·10 claims
- 2854US11003873B2Optical measuring system and methodZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2019·Granted May 11, 2021·0 cites·20 claims
- 2954US2025187125A1Method and Manufacturing Installation for Producing a Plurality of WorkpiecesZEISS CARL AG·Filed 2025·Application pending·0 cites
- 3051US11454493B2Method and arrangement for determining a position and/or an alignment of a movable object of an arrangement of objectsZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2021·Granted Sep 27, 2022·0 cites·20 claims
- 3150US11189040B2Arrangement and method for capturing a mark arrangement arranged on an objectZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2019·Granted Nov 30, 2021·0 cites·12 claims
- 3247US10067028B2Calibration structure and calibration method for calibrating optical measuring devicesZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Sep 4, 2018·0 cites·17 claims
- 3347US2020363187A1Light sensor and coordinate measuring machineZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2020·Application pending·0 cites
- 3446US10371500B2Incident-light illumination for a variable working distanceZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Aug 6, 2019·0 cites·21 claims
- 3545US2019391372A1Metrological optical imaging device and system for determining a position of a movable object in spaceZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2019·Application pending·0 cites
- 3643US10753725B2Measuring apparatus and method for controlling the illumination for a measuring apparatusZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Aug 25, 2020·0 cites·16 claims
- 3743US10151576B2Confocally chromatic sensor for determining coordinates of a measurement objectZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Dec 11, 2018·0 cites·15 claims
- 3842US10422629B2Method and apparatus for determining a plurality of spatial coordinates on a measurement objectZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Sep 24, 2019·0 cites·11 claims
- 3940US12140411B2Standard for calibrating a coordinate measuring machineZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2019·Granted Nov 12, 2024·0 cites·23 claims
- 4040US10922836B2Method and system for determining a 3D position of an object in spaceZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Feb 16, 2021·0 cites·20 claims
- 4140US9939261B2Method and device for calibrating an imaging optical unit for metrological applicationsZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2016·Granted Apr 10, 2018·0 cites·18 claims
- 4239US9990724B2Image recording simulation in a coordinate measuring machineZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2016·Granted Jun 5, 2018·0 cites·16 claims
- 4339US2017292827A1Coordinate measuring systemZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →