Inventor · disambiguated record
Martti Sonninen
Also filed as: SONNINEN MARTTI
1 granted patent·2 pending applications·40 citations·filing 2003–2006
50Inventor score
Technology areasC30B
Files withPLANAR SYSTEMS INC3
Top patents by PatentIndex Score
3 records- 0192US7141095B2Precursor material delivery system for atomic layer depositionPLANAR SYSTEMS INC·Filed 2003·Granted Nov 28, 2006·40 cites·36 claims
- 0256US2007089674A1Precursor material delivery system with thermal enhancements for atomic layer depositionPLANAR SYSTEMS INC·Filed 2006·Application pending·0 cites
- 0356US2007117383A1Precursor material delivery system with staging volume for atomic layer depositionPLANAR SYSTEMS INC·Filed 2006·Application pending·0 cites
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