Inventor · disambiguated record
Neung-Goo Yoon
Also filed as: YOON NEUNG-GOO
1 granted patent·2 pending applications·1,052 citations·filing 1999–2003
61Inventor score
Top patents by PatentIndex Score
3 records- 0190US6042652AAtomic layer deposition apparatus for depositing atomic layer on multiple substratesP K LTD·Filed 1999·Granted Mar 28, 2000·1.1k cites·17 claims
- 0234US2003159713A1Method and apparatus for cleaning and drying semiconductor waferTECH LTD REPUBLIC OF KOREA A·Filed 2003·Application pending·0 cites
- 0329US2003116174A1Semiconductor wafer cleaning apparatus and cleaning method using the sameFiled 2001·Application pending·0 cites
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