Inventor · disambiguated record
Niklas Svedin
Also filed as: SVEDIN NIKLAS
12 granted patents·106 citations·filing 1997–2014
89Inventor score
Files withSILEX MICROSYSTEMS AB4EBEFORS THORBJOERN2EBEFORS THORBJORN2EBEFORS THORBJÖRN2Silex Microsystems AG1
Top patents by PatentIndex Score
12 records- 0185US8485416B2Bonding process and bonded structuresEBEFORS THORBJORN·Filed 2012·Granted Jul 16, 2013·8 cites·8 claims
- 0276US6055869ALift force fluid flow sensor for measuring fluid flow velocitiesFiled 1997·Granted May 2, 2000·45 cites·54 claims
- 0373US9718674B2Thin capping for MEMS devicesSILEX MICROSYSTEMS AB·Filed 2014·Granted Aug 1, 2017·3 cites·10 claims
- 0471US7560802B2Electrical connections in substratesSilex Microsystems AG·Filed 2004·Granted Jul 14, 2009·25 cites·20 claims
- 0571US7172911B2Deflectable microstructure and method of manufacturing the same through bonding of wafersSILEX MICROSYSTEMS AB·Filed 2003·Granted Feb 6, 2007·20 cites·16 claims
- 0665US8592981B2Via structure and method thereofEBEFORS THORBJOERN·Filed 2009·Granted Nov 26, 2013·3 cites·7 claims
- 0761US8866289B2Bonding process and bonded structuresEBEFORS THORBJORN·Filed 2012·Granted Oct 21, 2014·1 cites·6 claims
- 0856US8630033B2Via structure and method thereofEBEFORS THORBJOERN·Filed 2011·Granted Jan 14, 2014·1 cites·4 claims
- 0950US9448401B2Via structure and method thereofSILEX MICROSYSTEMS AB·Filed 2013·Granted Sep 20, 2016·0 cites·10 claims
- 1045US8729685B2Bonding process and bonded structuresEBEFORS THORBJÖRN·Filed 2010·Granted May 20, 2014·0 cites·13 claims
- 1143US9511999B2Thin film cappingSILEX MICROSYSTEMS AB·Filed 2012·Granted Dec 6, 2016·0 cites·12 claims
- 1240US8729713B2Via structure and method thereofEBEFORS THORBJÖRN·Filed 2011·Granted May 20, 2014·0 cites·17 claims
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