Inventor · disambiguated record

Hun-Hwan Ha

Also filed as: HA HUN-HWAN

3 granted patents·48 citations·filing 1998–2009

72Inventor score

Technology areasH10P

Files withSAMSUNG ELECTRONICS CO LTD3

Top patents by PatentIndex Score

3 records

0177US6398430B1Semiconductor device fabrication systemSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Jun 4, 2002·19 cites·15 claims
0269US8027017B2Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bathSAMSUNG ELECTRONICS CO LTD·Filed 2009·Granted Sep 27, 2011·5 cites·13 claims
0361US6358672B2Method of forming semiconductor device pattern including cross-linking and flow baking a positive photoresistSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Mar 19, 2002·24 cites·9 claims

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