Inventor · disambiguated record
Sheng-Hui Hsieh
Also filed as: HSIEH SHENG-HUI
4 granted patents·0 citations·filing 2006–2010
53Inventor score
Top patents by PatentIndex Score
4 records- 0153US8520194B2Method of forming a deposited material by utilizing a multi-step deposition/etch/deposition (D/E/D) processLUOH TUUNG·Filed 2008·Granted Aug 27, 2013·0 cites·6 claims
- 0252US8184288B2Method of depositing a silicon-containing material by utilizing a multi-step fill-in process in a deposition machineLUOH TUUNG·Filed 2009·Granted May 22, 2012·0 cites·10 claims
- 0345US7553755B2Method for symmetric deposition of metal layerMACRONIX INT CO LTD·Filed 2006·Granted Jun 30, 2009·0 cites·18 claims
- 0435US8580680B2Metal silicide formationLUOH TUUNG·Filed 2010·Granted Nov 12, 2013·0 cites·21 claims
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