Inventor · disambiguated record
Volker Graeschus
Also filed as: GRAESCHUS VOLKER
4 granted patents·1 pending application·4 citations·filing 2006–2014
62Inventor score
Top patents by PatentIndex Score
5 records- 0179US9146475B2Projection exposure system and projection exposure methodZEISS CARL SMT GMBH·Filed 2013·Granted Sep 29, 2015·3 cites·33 claims
- 0259US8174676B2Method for correcting a lithography projection objective, and such a projection objectiveULRICH WILHELM·Filed 2011·Granted May 8, 2012·1 cites·21 claims
- 0349US9665006B2Projection exposure method and projection exposure apparatus for microlithographyZEISS CARL SMT GMBH·Filed 2014·Granted May 30, 2017·0 cites·26 claims
- 0448US8659744B2Method for correcting a lithography projection objective, and such a projection objectiveULRICH WILHELM·Filed 2012·Granted Feb 25, 2014·0 cites·32 claims
- 0541US2007019305A1Method for correcting a lithography projection objective, and such a projection objectiveULRICH WILHELM·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →