Inventor · disambiguated record
Hidetsugu Yano
Also filed as: YANO HIDETSUGU
3 granted patents·7 citations·filing 2011–2014
59Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0172US9721813B2Liquid processing apparatus with cleaning jigTOKYO ELECTRON LTD·Filed 2013·Granted Aug 1, 2017·3 cites·8 claims
- 0271US8951359B2Liquid processing apparatus, liquid processing method and computer-readable storage medium storing liquid processing programINADA TAKAO·Filed 2011·Granted Feb 10, 2015·4 cites·6 claims
- 0352US9224624B2Liquid processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Dec 29, 2015·0 cites·4 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →