Inventor · disambiguated record

Blake E. Cherrington

Also filed as: CHERRINGTON BLAKE E

1 granted patent·79 citations·filing 1997–1997

52Inventor score

Technology areasH01J

Files withUNIV TEXAS1

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1 record

0189US6028285AHigh density plasma source for semiconductor processingUNIV TEXAS·Filed 1997·Granted Feb 22, 2000·79 cites·39 claims

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