Inventor · disambiguated record
Hubertus Johannes Gertrudus Simons
Also filed as: SIMONS HUBERTUS JOHANNES GERTR · SIMONS HUBERTUS JOHANNES GERTRUDUS
24 granted patents·2 pending applications·340 citations·filing 2003–2021
96Inventor score
Files withASML NETHERLANDS BV18MOS EVERHARDUS CORNELIS4ASML NETHERLANDS N V1LYULINA IRINA1VAN BILSEN FRANCISCUS BERNARDUS MARIA1
Top patents by PatentIndex Score
26 records- 0197US8706442B2Alignment system, lithographic system and methodMOS EVERHARDUS CORNELIS·Filed 2009·Granted Apr 22, 2014·89 cites·20 claims
- 0296US7880880B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2005·Granted Feb 1, 2011·24 cites·15 claims
- 0395US7329888B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2005·Granted Feb 12, 2008·18 cites·28 claims
- 0495US6844918B2Alignment system and methods for lithographic systems using at least two wavelengthsASML NETHERLANDS BV·Filed 2003·Granted Jan 18, 2005·54 cites·137 claims
- 0594US7683351B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Mar 23, 2010·20 cites·21 claims
- 0693US7297971B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2005·Granted Nov 20, 2007·12 cites·3 claims
- 0792US9291916B2Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methodsASML NETHERLANDS BV·Filed 2015·Granted Mar 22, 2016·5 cites·12 claims
- 0892US8976355B2Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methodsVAN DER SANDEN STEFAN CORNELIS THEODORUS·Filed 2012·Granted Mar 10, 2015·19 cites·8 claims
- 0992US8139217B2Alignment systems and methods for lithographic systemsVAN BILSEN FRANCISCUS BERNARDUS MARIA·Filed 2010·Granted Mar 20, 2012·12 cites·18 claims
- 1090US7439531B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2006·Granted Oct 21, 2008·7 cites·32 claims
- 1190US7332732B2Alignment systems and methods for lithographic systemsASML NETHERLANDS BV·Filed 2003·Granted Feb 19, 2008·22 cites·143 claims
- 1284US7468795B2Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the sameASML NETHERLANDS BV·Filed 2006·Granted Dec 23, 2008·9 cites·34 claims
- 1382US7259828B2Alignment system and method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Aug 21, 2007·25 cites·40 claims
- 1480US8887107B2Inspection method and apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2013·Granted Nov 11, 2014·2 cites·18 claims
- 1579US8982347B2Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatusASML NETHERLANDS N V·Filed 2012·Granted Mar 17, 2015·8 cites·17 claims
- 1676US11170072B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Nov 9, 2021·2 cites·21 claims
- 1776US8248579B2Lithographic apparatus, device manufacturing method and device for correcting overlay errors between overlapping patternsMOS EVERHARDUS CORNELIS·Filed 2007·Granted Aug 21, 2012·4 cites·21 claims
- 1872US8237914B2Process, apparatus, and device for determining intra-field correction to correct overlay errors between overlapping patternsMOS EVERHARDUS CORNELIS·Filed 2007·Granted Aug 7, 2012·3 cites·21 claims
- 1971US11061336B2Device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 13, 2021·1 cites·20 claims
- 2066US9927717B2Inspection method and apparatus, and lithographic apparatusASML NETHERLANDS BV·Filed 2014·Granted Mar 27, 2018·1 cites·20 claims
- 2161US2022027437A1Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 2255USRE49460EInspection method and apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2015·Granted Mar 14, 2023·0 cites·27 claims
- 2354USRE49199EInspection method and apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2015·Granted Sep 6, 2022·0 cites·27 claims
- 2454US7573574B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 11, 2009·3 cites·18 claims
- 2538US8504333B2Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing methodMOS EVERHARDUS CORNELIS·Filed 2010·Granted Aug 6, 2013·0 cites·13 claims
- 2637US2012218533A1Method of calculating model parameters of a substrate, a lithographic apparatus and an apparatus for controlling lithographic processing by a lithographic apparatusLYULINA IRINA·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →