Inventor · disambiguated record
Jisoo Suh
Also filed as: SUH JISOO
5 granted patents·5 pending applications·0 citations·filing 2015–2021
61Inventor score
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0167US11521886B2Substrate processing apparatus and substrate supportTOKYO ELECTRON LTD·Filed 2020·Granted Dec 6, 2022·0 cites·16 claims
- 0259US10825709B2Electrostatic chucking method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Nov 3, 2020·0 cites·18 claims
- 0359US2021316416A1Focus ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0451US10269607B2Electrostatic chucking method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Apr 23, 2019·0 cites·20 claims
- 0545US2017066103A1Focus ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 0643US2020267826A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0742US2020144090A1Placing table and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0841US2021217649A1Edge ring and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0936US10755902B2Plasma processing apparatus and focus ringTOKYO ELECTRON LTD·Filed 2016·Granted Aug 25, 2020·0 cites·20 claims
- 1035US10103011B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Oct 16, 2018·0 cites·3 claims
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