Inventor · disambiguated record
Hemalatha Erva
Also filed as: ERVA HEMALATHA
4 granted patents·11 citations·filing 2006–2006
61Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0178US7783669B2Data flow management in generating profile models used in optical metrologyTOKYO ELECTRON LTD·Filed 2006·Granted Aug 24, 2010·11 cites·17 claims
- 0246US7765234B2Data flow management in generating different signal formats used in optical metrologyTOKYO ELECTRON LTD·Filed 2006·Granted Jul 27, 2010·0 cites·26 claims
- 0343US7765076B2Allocating processing units to processing clusters to generate simulated diffraction signalsTOKYO ELECTRON LTD·Filed 2006·Granted Jul 27, 2010·0 cites·21 claims
- 0438US7742888B2Allocating processing units to generate simulated diffraction signals used in optical metrologyTOKYO ELECTRON LTD·Filed 2006·Granted Jun 22, 2010·0 cites·24 claims
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