Inventor · disambiguated record
Donald J. Delehanty
Also filed as: DELEHANTY DONALD J · DELEHANTY DONALD JOHN
6 granted patents·162 citations·filing 1997–2004
84Inventor score
Technology areasH10P
Files withIBM6
Top patents by PatentIndex Score
6 records- 0189US6425956B1Process for removing chemical mechanical polishing residual slurryIBM·Filed 2001·Granted Jul 30, 2002·44 cites·8 claims
- 0287US6837777B2Wafer edge cleaning utilizing polish pad materialIBM·Filed 2003·Granted Jan 4, 2005·39 cites·13 claims
- 0386US6622334B1Wafer edge cleaning utilizing polish pad materialIBM·Filed 2000·Granted Sep 23, 2003·35 cites·8 claims
- 0471US5780363AEtching composition and use thereofIBM·Filed 1997·Granted Jul 14, 1998·43 cites·19 claims
- 0541US7040966B2Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafersIBM·Filed 2004·Granted May 9, 2006·1 cites·20 claims
- 0635US7214623B2Planarization system and method using a carbonate containing fluidIBM·Filed 2003·Granted May 8, 2007·0 cites·23 claims
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