Inventor · disambiguated record

Daniel L. Birx Late Of

Also filed as: BIRX LATE OF DANIEL L

1 granted patent·139 citations·filing 2001–2001

54Inventor score

Technology areasH05G

Files withCYMER INC1

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1 record

0194US6586757B2Plasma focus light source with active and buffer gas controlCYMER INC·Filed 2001·Granted Jul 1, 2003·139 cites·27 claims

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