Inventor · disambiguated record
David J. Pinckney
Also filed as: PINCKNEY DAVID J · PINCKNEY DAVID JOHN
16 granted patents·7 pending applications·203 citations·filing 1996–2012
93Inventor score
Top patents by PatentIndex Score
23 records- 0196US6724001B1Electron beam lithography apparatus with self actuated vacuum bypass valveIBM·Filed 2003·Granted Apr 20, 2004·79 cites·17 claims
- 0289US7854202B2Overhead transport service vehicle and methodIBM·Filed 2007·Granted Dec 21, 2010·14 cites·23 claims
- 0383US7591624B2Reticle storage pod (RSP) transport system utilizing FOUP adapter plateIBM·Filed 2006·Granted Sep 22, 2009·8 cites·1 claims
- 0482US6806943B2Mask clamping deviceIBM·Filed 2002·Granted Oct 19, 2004·24 cites·22 claims
- 0581US7887277B2Reticle storage pod (RSP) transport system utilizing FOUP adapter plateIBM·Filed 2009·Granted Feb 15, 2011·6 cites·12 claims
- 0674US6960772B1Mask carrierIBM·Filed 2004·Granted Nov 1, 2005·11 cites·20 claims
- 0772US8113123B2Overhead transport service vehicle and methodMENSER JR CLAYTON D·Filed 2010·Granted Feb 14, 2012·3 cites·23 claims
- 0864US6615481B1Method for fabrication of electromagnetic coil vanesNIKON CORP·Filed 2000·Granted Sep 9, 2003·10 cites·17 claims
- 0962US6414313B1Multiple numerical aperture electron beam projection lithography systemNIKON CORP·Filed 1999·Granted Jul 2, 2002·15 cites·24 claims
- 1055US9033638B2OHT accessible high density stocker and methodGIFFORD JEFFREY P·Filed 2007·Granted May 19, 2015·4 cites·24 claims
- 1150US5742065AHeater for membrane mask in an electron-beam lithography systemIBM·Filed 1997·Granted Apr 21, 1998·15 cites·12 claims
- 1247US6818906B1Electron beam position reference systemIBM·Filed 2003·Granted Nov 16, 2004·1 cites·6 claims
- 1345US6908255B2Remote clamping mechanism via vacuum feedthroughIBM·Filed 2003·Granted Jun 21, 2005·1 cites·10 claims
- 1444US2007039513A1Contour adapting active particulate collection systemIBM·Filed 2005·Application pending·0 cites
- 1543US2011308766A1System and Method for Reducing Static Pressure in Air HandlersDEANGELIS ROBERT LOUIS·Filed 2010·Application pending·0 cites
- 1642US2008240892A1Storage buffer device for automated material handling systemsIBM·Filed 2007·Application pending·0 cites
- 1740US5843623ALow profile substrate ground probeIBM·Filed 1996·Granted Dec 1, 1998·4 cites·17 claims
- 1840US2007128010A1An apparatus for pod transportation within a semiconductor fabrication facilityIBM·Filed 2005·Application pending·0 cites
- 1940US2007160448A1Receipt and delivery control system for front opening unified and reticle storage podsIBM·Filed 2006·Application pending·0 cites
- 2038US2008077273A1Zero footprint mobile loadportGIFFORD JEFFREY P·Filed 2006·Application pending·0 cites
- 2137US2013190933A1Energy efficient air flow controlDEANGELIS ROBERT L·Filed 2012·Application pending·0 cites
- 2236US6461680B2Simplified fabrication method of toroidal charged particle deflector vanesNIKON CORP·Filed 1999·Granted Oct 8, 2002·5 cites·18 claims
- 2333US6246053B1Non-contact autofocus height detector for lithography systemsIBM·Filed 1999·Granted Jun 12, 2001·3 cites·7 claims
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