Inventor · disambiguated record
Ja Yul Kim
Also filed as: KIM JA-YUL
3 granted patents·2 pending applications·2 citations·filing 2012–2023
53Inventor score
Top patents by PatentIndex Score
5 records- 0157US9287155B2Apparatus and method of controlling chuck, and exposure apparatus and control method thereofKIM JA YUL·Filed 2012·Granted Mar 15, 2016·1 cites·16 claims
- 0256US9069336B2Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereofKIM JA YUL·Filed 2012·Granted Jun 30, 2015·1 cites·11 claims
- 0351US2024120224A1Semiconductor manufacturing equipment, and method for transporting replaceable components in the semiconductor manufacturing equipmentSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0448US9507272B2Apparatus and method of controlling chuck, and exposure apparatus and control method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 29, 2016·0 cites·2 claims
- 0538US2019113847A1Control method of exposure apparatus and control apparatus of exposure apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
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