Inventor · disambiguated record
Yangang He
Also filed as: HE YANGANG
1 granted patent·1 pending application·0 citations·filing 2013–2013
9Inventor score
Technology areasH10P
Files withUNIV HEBEI TECHNOLOGY2
Top patents by PatentIndex Score
2 records- 0139US8912134B2Method of cleaning copper material surfaces in ultra large scale integrated circuits after polishing the sameUNIV HEBEI TECHNOLOGY·Filed 2013·Granted Dec 16, 2014·0 cites·4 claims
- 0231US2013133691A1Method of cleaning tungsten plug surfaces in ultra large scale integrated circuits after chemical-mechanical polishingUNIV HEBEI TECHNOLOGY·Filed 2013·Application pending·0 cites
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