Inventor · disambiguated record
Michael A. Leach
Also filed as: LEACH MICHAEL · LEACH MICHAEL A · LEACH MICHAEL ALBERT
23 granted patents·2,139 citations·filing 1987–2017
97Inventor score
Top patents by PatentIndex Score
23 records- 0199US4793895AIn situ conductivity monitoring technique for chemical/mechanical planarization endpoint detectionIBM·Filed 1988·Granted Dec 27, 1988·330 cites·18 claims
- 0297US4910155AWafer flood polishingIBM·Filed 1988·Granted Mar 20, 1990·222 cites·20 claims
- 0397US4838991AProcess for defining organic sidewall structuresIBM·Filed 1988·Granted Jun 13, 1989·362 cites·4 claims
- 0496US4956313AVia-filling and planarization techniqueIBM·Filed 1988·Granted Sep 11, 1990·207 cites·10 claims
- 0595US5213655ADevice and method for detecting an end point in polishing operationIBM·Filed 1992·Granted May 25, 1993·119 cites·8 claims
- 0695US4934102ASystem for mechanical planarizationIBM·Filed 1988·Granted Jun 19, 1990·160 cites·20 claims
- 0794US5607341AMethod and structure for polishing a wafer during manufacture of integrated circuitsFiled 1994·Granted Mar 4, 1997·81 cites·16 claims
- 0891US5242524ADevice for detecting an end point in polishing operationsIBM·Filed 1993·Granted Sep 7, 1993·74 cites·6 claims
- 0991US4776087AVLSI coaxial wiring structureIBM·Filed 1987·Granted Oct 11, 1988·96 cites·4 claims
- 1089US5132617AMethod of measuring changes in impedance of a variable impedance load by disposing an impedance connected coil within the air gap of a magnetic coreIBM·Filed 1990·Granted Jul 21, 1992·63 cites·9 claims
- 1187US5836807AMethod and structure for polishing a wafer during manufacture of integrated circuitsFiled 1996·Granted Nov 17, 1998·60 cites·63 claims
- 1287US5760475ARefractory metal-titanium nitride conductive structuresIBM·Filed 1994·Granted Jun 2, 1998·68 cites·3 claims
- 1386US5356513APolishstop planarization method and structureIBM·Filed 1993·Granted Oct 18, 1994·79 cites·24 claims
- 1482US5733175APolishing a workpiece using equal velocity at all points overlapping a polisherFiled 1994·Granted Mar 31, 1998·41 cites·31 claims
- 1580US6267655B1Retaining ring for wafer polishingMOSEL VITELIC INC·Filed 1998·Granted Jul 31, 2001·53 cites·18 claims
- 1680US5510652APolishstop planarization structureIBM·Filed 1994·Granted Apr 23, 1996·54 cites·7 claims
- 1763US5702290ABlock for polishing a wafer during manufacture of integrated circuitsFiled 1996·Granted Dec 30, 1997·18 cites·17 claims
- 1857US5136124AMethod of forming conductors within an insulating substrateIBM·Filed 1990·Granted Aug 4, 1992·27 cites·4 claims
- 1953US9848534B1Agricultural harvesting unit and method of harvesting using the unitCRARY IND INC·Filed 2016·Granted Dec 26, 2017·1 cites·20 claims
- 2051US4985990AMethod of forming conductors within an insulating substrateIBM·Filed 1988·Granted Jan 22, 1991·17 cites·14 claims
- 2137US10426085B2Centrifugal fan rotor and apparatus incorporating the centrifugal fan rotorCRARY IND INC·Filed 2016·Granted Oct 1, 2019·0 cites·25 claims
- 2237USRE38029EWafer polishing and endpoint detectionIBM·Filed 1992·Granted Mar 11, 2003·7 cites·42 claims
- 2334US10130032B2Volume extending assembly for combine storage tankCRARY IND INC·Filed 2017·Granted Nov 20, 2018·0 cites·23 claims
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