Inventor · disambiguated record
Benjamin Petro
Also filed as: PETRO BENJAMIN
8 granted patents·2 pending applications·15 citations·filing 2015–2021
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0185US10124464B2Corrosion inhibitors and related compositions and methodsCABOT MICROELECTRONICS CORP·Filed 2015·Granted Nov 13, 2018·6 cites·4 claims
- 0283US10418248B2Method of polishing group III-V materialsCABOT MICROELECTRONICS CORP·Filed 2017·Granted Sep 17, 2019·4 cites·12 claims
- 0380US9834704B2Cobalt dishing control agentsCABOT MICROELECTRONICS CORP·Filed 2015·Granted Dec 5, 2017·3 cites·7 claims
- 0474US9688885B2Cobalt polishing acceleratorsCABOT MICROELECTRONICS CORP·Filed 2015·Granted Jun 27, 2017·2 cites·8 claims
- 0555US2021115298A1Composition and method for dielectric cmpCMC MAT INC·Filed 2020·Application pending·0 cites
- 0655US2021115299A1Composition and method for dielectric cmpCMC MAT INC·Filed 2020·Application pending·0 cites
- 0754US11725116B2CMP composition including a novel abrasiveCMC MAT INC·Filed 2021·Granted Aug 15, 2023·0 cites·32 claims
- 0853US12269969B2Polishing composition and method with high selectivity for silicon nitride and polysilicon over silicon oxideCMC MAT INC·Filed 2020·Granted Apr 8, 2025·0 cites·8 claims
- 0948US9850403B2Cobalt polishing acceleratorsCABOT MICROELECTRONICS CORP·Filed 2017·Granted Dec 26, 2017·0 cites·10 claims
- 1038US9944828B2Slurry for chemical mechanical polishing of cobaltCABOT MICROELECTRONICS CORP·Filed 2015·Granted Apr 17, 2018·0 cites·19 claims
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