Inventor · disambiguated record

Ryuichi Yui

Also filed as: YUI RYUICHI

2 granted patents·1 citations·filing 2019–2019

29Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0166US11456160B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Sep 27, 2022·1 cites·8 claims
0239US11328908B2Adjustment method for filter unit and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted May 10, 2022·0 cites·13 claims

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Ryuichi Yui — Patent Inventor | PatentIndex