Inventor · disambiguated record
Kazunori Gotoda
Also filed as: GOTODA KAZUNORI
2 granted patents·26 citations·filing 1996–2001
60Inventor score
Top patents by PatentIndex Score
2 records- 0175US6900439B2Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatusTOMOE SHOKAI CO LTD·Filed 2001·Granted May 31, 2005·21 cites·29 claims
- 0222US5672325AMethod for the oxidation treatment of decaborane gasJAPAN ATOMIC ENERGY RES INST·Filed 1996·Granted Sep 30, 1997·5 cites·2 claims
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