Inventor · disambiguated record
Renatus Gerardus Klaver
Also filed as: KLAVER RENATUS GERARDUS
5 granted patents·3 pending applications·125 citations·filing 1999–2009
79Inventor score
Files withKONINKL PHILIPS ELECTRONICS NV3ASML NETHERLANDS BV1EUSSEN EMIEL JOZEF MELANIE1KLAVER RENATUS GERARDUS1STICHTING TECH WETENSCHAPP1
Top patents by PatentIndex Score
8 records- 0198US7636165B2Displacement measurement systems lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Dec 22, 2009·104 cites·43 claims
- 0273US8390820B2Displacement measurement system having a prism, for displacement measurement between two or more gratingsKLAVER RENATUS GERARDUS·Filed 2009·Granted Mar 5, 2013·4 cites·17 claims
- 0360US8248583B2Lithographic apparatus and calibration methodVAN DEN BRINK MARINUS AART·Filed 2009·Granted Aug 21, 2012·1 cites·18 claims
- 0456US8614783B2Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement systemEUSSEN EMIEL JOZEF MELANIE·Filed 2009·Granted Dec 24, 2013·2 cites·34 claims
- 0550US6577400B1InterferometerSTICHTING TECH WETENSCHAPP·Filed 1999·Granted Jun 10, 2003·14 cites·12 claims
- 0645US2010259768A1Displacement device with precision measurementKONINKL PHILIPS ELECTRONICS NV·Filed 2008·Application pending·0 cites
- 0741US2009153880A1Optical system for detecting motion of a bodyKONINKL PHILIPS ELECTRONICS NV·Filed 2005·Application pending·0 cites
- 0833US2009147265A1Detection system for detecting translations of a bodyKONINKL PHILIPS ELECTRONICS NV·Filed 2005·Application pending·0 cites
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