Inventor · disambiguated record
Tadashi Aoto
Also filed as: AOTO TADASHI
8 granted patents·1 pending application·78 citations·filing 2001–2020
83Inventor score
Top patents by PatentIndex Score
9 records- 0191US6899786B2Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanismTOKYO ELECTRON LTD·Filed 2001·Granted May 31, 2005·52 cites·4 claims
- 0286US7481903B2Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanismTOKYO ELECTRON LTD·Filed 2005·Granted Jan 27, 2009·11 cites·3 claims
- 0385US10153138B2Plasma etching apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Dec 11, 2018·7 cites·17 claims
- 0478US9412635B2Electrostatic chuck deviceTOKYO ELECTRON LTD·Filed 2013·Granted Aug 9, 2016·4 cites·5 claims
- 0573US9589823B2Mounting table and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Mar 7, 2017·4 cites·12 claims
- 0649US9214376B2Substrate mounting stage and surface treatment method thereforHIGUMA MASAKAZU·Filed 2008·Granted Dec 15, 2015·0 cites·16 claims
- 0745US8343372B2Surface processing method for mounting stageTOKYO ELECTRON LTD·Filed 2008·Granted Jan 1, 2013·0 cites·8 claims
- 0844US7815492B2Surface treatment methodTOKYO ELECTRON LTD·Filed 2007·Granted Oct 19, 2010·0 cites·6 claims
- 0942US2020243372A1Susceptor, substrate processing apparatus and protection methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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