Inventor · disambiguated record
Deok-Yong Kim
Also filed as: KIM DEOK J · KIM DEOK-YONG
13 granted patents·6 pending applications·57 citations·filing 1999–2020
88Inventor score
Files withSAMSUNG ELECTRONICS CO LTD13XIA TAI XIN SEMICONDUCTOR QING DAO LTD2KOREA MACH & MATERIALS INST1SAMSUNG ELECTRONICS CO INC1
Top patents by PatentIndex Score
19 records- 0177US9322771B2Apparatus and method for monitoring semiconductor fabrication processes using polarized lightSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Apr 26, 2016·4 cites·18 claims
- 0261US6545491B2Apparatus for detecting defects in semiconductor devices and methods of using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Apr 8, 2003·11 cites·31 claims
- 0359US7466853B2Method and apparatus for detecting defects on a waferSAMSUNG ELECTRONICS CO INC·Filed 2003·Granted Dec 16, 2008·7 cites·27 claims
- 0459US7200258B2Method for selecting reference images, method and apparatus for inspecting patterns on wafers, and method for dividing a wafer into application regionsSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Apr 3, 2007·7 cites·42 claims
- 0557US6995074B2Method for manufacturing a semiconductor waferSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Feb 7, 2006·6 cites·37 claims
- 0652US7245365B2Apparatus and method for detecting particles on an objectSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jul 17, 2007·3 cites·38 claims
- 0750US11133227B2Semiconductor device having active region and method for fabricating the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Sep 28, 2021·0 cites·7 claims
- 0850US6525318B1Methods of inspecting integrated circuit substrates using electron beamsSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Feb 25, 2003·19 cites·20 claims
- 0946US11158499B2Semiconductor component and method for fabricating the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2020·Granted Oct 26, 2021·0 cites·12 claims
- 1046US9165354B2Method of analyzing photolithography processesSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Oct 20, 2015·0 cites·19 claims
- 1145US2008213069A1Apparatus for fabricating semiconductor devices and methods of fabricating semiconductor devices using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
- 1244US9551653B2Methods for monitoring semiconductor fabrication processes using polarized lightSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jan 24, 2017·0 cites·14 claims
- 1341US2005214933A1Ultrasonic micromixer with radiation perpendicular to mixing interfaceKOREA MACH & MATERIALS INST·Filed 2004·Application pending·0 cites
- 1440US7084969B2Method of optimizing focus of optical inspection apparatus and method and apparatus of detecting defects using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Aug 1, 2006·0 cites·24 claims
- 1540US2014342477A1Method of monitoring semiconductor fabrication process using xpsSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
- 1637US2004141640A1Method for apparatus for detecting defects on a waferFiled 2004·Application pending·0 cites
- 1734US2003120366A1Semiconductor cleaning system and method of controlling the operation of the sameFiled 2002·Application pending·0 cites
- 1831US2015219446A1Methods and apparatuses for measuring values of parameters of integrated circuit devicesSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
- 1922US6100102AMethod of in-line monitoring for shallow pit on semiconductor substrateSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Aug 8, 2000·0 cites·16 claims
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