Inventor · disambiguated record
Yoshiyuki Harima
Also filed as: HARIMA YOSHIYUKI
5 granted patents·1 pending application·121 citations·filing 1990–2020
80Inventor score
Top patents by PatentIndex Score
6 records- 0186US11244810B2Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Feb 8, 2022·2 cites·16 claims
- 0280US5048164AVertical heat-treatment apparatus having boat transfer mechanismTEL SAGAMI LTD·Filed 1990·Granted Sep 17, 1991·87 cites·17 claims
- 0357US6634370B2Liquid treatment system and liquid treatment methodTOKYO ELECTRON LTD·Filed 2001·Granted Oct 21, 2003·6 cites·11 claims
- 0452US5971696ASystem for carrying-in of cassette for substrates to be processedTOKYO ELECTRON LTD·Filed 1997·Granted Oct 26, 1999·22 cites·16 claims
- 0551US6736945B2Wafer plating apparatusELECTROPLATING ENG·Filed 2001·Granted May 18, 2004·4 cites·8 claims
- 0638US2001017105A1Wafer plating apparatusELECTROPLATING ENG·Filed 2001·Application pending·0 cites
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