Inventor · disambiguated record
Georgios Tsirogiannis
Also filed as: TSIROGIANNIS GEORGIOS
7 granted patents·2 pending applications·4 citations·filing 2017–2023
73Inventor score
Files withASML NETHERLANDS BV9
Top patents by PatentIndex Score
9 records- 0180US11099486B2Generating predicted data for control or monitoring of a production processASML NETHERLANDS BV·Filed 2017·Granted Aug 24, 2021·3 cites·21 claims
- 0276US12204252B2Method for decision making in a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 0376US11687007B2Method for decision making in a semiconductor manufacturing processASML NETHERLANDS BV·Filed 2020·Granted Jun 27, 2023·1 cites·20 claims
- 0469US11520238B2Optimizing an apparatus for multi-stage processing of product unitsASML NETHERLANDS BV·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 0559US11774869B2Method and system for determining overlayASML NETHERLANDS BV·Filed 2020·Granted Oct 3, 2023·0 cites·14 claims
- 0656US11150562B2Optimizing an apparatus for multi-stage processing of product unitsASML NETHERLANDS BV·Filed 2018·Granted Oct 19, 2021·0 cites·20 claims
- 0751US11099485B2Maintaining a set of process fingerprintsASML NETHERLANDS BV·Filed 2018·Granted Aug 24, 2021·0 cites·20 claims
- 0850US2023341783A1Determining lithographic matching performanceASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0938US2018239851A1Apparatus and method for inferring parameters of a model of a measurement structure for a patterning processASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
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