Inventor · disambiguated record
Eiichiro Okamoto
Also filed as: OKAMOTO EIICHIRO
6 granted patents·6 citations·filing 2013–2016
69Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0185US9536761B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jan 3, 2017·5 cites·11 claims
- 0261US9793142B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Oct 17, 2017·1 cites·13 claims
- 0347US9782807B2Substrate processing system, method for controlling substrate processing system, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Oct 10, 2017·0 cites·8 claims
- 0443US9818626B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Nov 14, 2017·0 cites·11 claims
- 0535US10713772B2Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Jul 14, 2020·0 cites·21 claims
- 0634US9895711B2Substrate liquid processing apparatus, substrate liquid processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Feb 20, 2018·0 cites·11 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →