Inventor · disambiguated record
Akira Tokui
Also filed as: TOKUI AKIRA
12 granted patents·1,720 citations·filing 1986–1993
93Inventor score
Top patents by PatentIndex Score
12 records- 0198US5178682AMethod for forming a thin layer on a semiconductor substrate and apparatus thereforMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Jan 12, 1993·661 cites·5 claims
- 0298US5174881AApparatus for forming a thin film on surface of semiconductor substrateMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Dec 29, 1992·448 cites·4 claims
- 0397US5407867AMethod of forming a thin film on surface of semiconductor substrateMITSUBISHKI DENKI KABUSHIKI KA·Filed 1992·Granted Apr 18, 1995·380 cites·10 claims
- 0485US5028560AMethod for forming a thin layer on a semiconductor substrateMITSUBISHI ELECTRIC CORP·Filed 1989·Granted Jul 2, 1991·71 cites·9 claims
- 0580US5470799AMethod for pretreating semiconductor substrate by photochemically removing native oxideMITSUBISHI ELECTRIC CORP·Filed 1989·Granted Nov 28, 1995·54 cites·10 claims
- 0673US5270796AApparatus for inspecting a phase shift maskMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Dec 14, 1993·28 cites·9 claims
- 0771US5258266AMethod of forming minute patterns using positive chemically amplifying type resistMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Nov 2, 1993·33 cites·7 claims
- 0867US5158861AMethod of forming minute patterns using chemically amplifying type resistMITSUBISHI ELECTRIC CORP·Filed 1990·Granted Oct 27, 1992·21 cites·12 claims
- 0952US5384218APhotomask and pattern transfer method for transferring a pattern onto a substrate having different levelsMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Jan 24, 1995·15 cites·5 claims
- 1039US4702796AMethod for fabricting a semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 1986·Granted Oct 27, 1987·9 cites·10 claims
- 1130US4956310ASemiconductor memory device and fabricating method thereofMITSUBISHI ELECTRIC CORP·Filed 1988·Granted Sep 11, 1990·0 cites·4 claims
- 1230US4763182ASemiconductor memory device with deep bit-line channel stopperMITSUBISHI ELECTRIC CORP·Filed 1986·Granted Aug 9, 1988·0 cites·2 claims
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