Inventor · disambiguated record
Boyu Dong
Also filed as: DONG BOYU
7 granted patents·2 pending applications·12 citations·filing 2013–2022
75Inventor score
Top patents by PatentIndex Score
9 records- 0185US9362129B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Jun 7, 2016·7 cites·9 claims
- 0282US10640862B2Method for forming film and method for forming aluminum nitride filmBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted May 5, 2020·2 cites·18 claims
- 0372US10643843B2Film forming method and aluminum nitride film forming method for semiconductor apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2017·Granted May 5, 2020·2 cites·20 claims
- 0461US10937672B2Heating device and heating chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2015·Granted Mar 2, 2021·1 cites·18 claims
- 0555US11315768B2Loading apparatus and physical vapor deposition apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Apr 26, 2022·0 cites·18 claims
- 0652US2024368803A1Reaction chamber and semiconductor equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Application pending·0 cites
- 0744US10984994B2Deposition apparatus and physical vapor deposition chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted Apr 20, 2021·0 cites·20 claims
- 0842US2014083468A1Substrate processing apparatusEBARA CORP·Filed 2013·Application pending·0 cites
- 0941US11710624B2Sputtering methodBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2020·Granted Jul 25, 2023·0 cites·9 claims
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