Inventor · disambiguated record
Mariusz Oldziej
Also filed as: Oldziej Mariusz
7 granted patents·2 pending applications·53 citations·filing 2016–2024
83Inventor score
Files withMKS INSTR INC9
Top patents by PatentIndex Score
9 records- 0197US11935726B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2021·Granted Mar 19, 2024·6 cites·31 claims
- 0297US11527384B2Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbancesMKS INSTR INC·Filed 2020·Granted Dec 13, 2022·4 cites·30 claims
- 0396US11536755B2System and method for arc detection using a bias RF generator signalMKS INSTR INC·Filed 2020·Granted Dec 27, 2022·13 cites·24 claims
- 0495US10229816B2Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning networkMKS INSTR INC·Filed 2016·Granted Mar 12, 2019·17 cites·43 claims
- 0594US11158488B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2019·Granted Oct 26, 2021·13 cites·36 claims
- 0684US2025069853A1Apparatus and tuning method for mitigating rf load impedance variations due to periodic disturbancesMKS INSTR INC·Filed 2024·Application pending·0 cites
- 0780US12183549B2Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbancesMKS INSTR INC·Filed 2022·Granted Dec 31, 2024·0 cites·26 claims
- 0868US12131884B2Pulse and bias synchronization methods and systemsMKS INSTR INC·Filed 2022·Granted Oct 29, 2024·0 cites·31 claims
- 0960US2025174436A1Source Tuning With Pulsed DC BiasMKS INSTR INC·Filed 2023·Application pending·0 cites
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