Inventor · disambiguated record
Aaron T. Radomski
Also filed as: RADOMSKI AARON · RADOMSKI AARON T
42 granted patents·5 pending applications·821 citations·filing 2001–2025
98Inventor score
Top patents by PatentIndex Score
47 records- 0198US9947514B2Plasma RF bias cancellation systemMKS INSTR INC·Filed 2016·Granted Apr 17, 2018·42 cites·33 claims
- 0297US11935726B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2021·Granted Mar 19, 2024·6 cites·31 claims
- 0397US11527384B2Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbancesMKS INSTR INC·Filed 2020·Granted Dec 13, 2022·4 cites·30 claims
- 0497US10049857B2Adaptive periodic waveform controllerMKS INSTR INC·Filed 2015·Granted Aug 14, 2018·47 cites·28 claims
- 0596US11536755B2System and method for arc detection using a bias RF generator signalMKS INSTR INC·Filed 2020·Granted Dec 27, 2022·13 cites·24 claims
- 0696US10741363B1Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matchingMKS INSTR INC·Filed 2019·Granted Aug 11, 2020·38 cites·26 claims
- 0796US10546724B2Pulsed, bidirectional radio frequency source/loadMKS INSTR INC·Filed 2018·Granted Jan 28, 2020·40 cites·47 claims
- 0896US7728602B2Harmonic derived arc detectorMKS INSTR INC·Filed 2007·Granted Jun 1, 2010·102 cites·33 claims
- 0995US11996274B2Real-time, non-invasive IEDF plasma sensorMKS INSTR INC·Filed 2022·Granted May 28, 2024·3 cites·39 claims
- 1095US11232931B2Intermodulation distortion mitigation using electronic variable capacitorMKS INSTR INC·Filed 2020·Granted Jan 25, 2022·10 cites·23 claims
- 1195US10229816B2Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning networkMKS INSTR INC·Filed 2016·Granted Mar 12, 2019·17 cites·43 claims
- 1294US11533805B2Cooling and compression clamp for short lead power devicesMKS INSTR INC·Filed 2021·Granted Dec 20, 2022·5 cites·6 claims
- 1394US11158488B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2019·Granted Oct 26, 2021·13 cites·36 claims
- 1494US8736377B2RF pulse edge shapingMKS INSTR INC·Filed 2012·Granted May 27, 2014·24 cites·18 claims
- 1594US8040068B2Radio frequency power control systemMKS INSTR INC·Filed 2009·Granted Oct 18, 2011·140 cites·46 claims
- 1693US10217609B2Adaptive periodic waveform controllerMKS INSTR INC·Filed 2018·Granted Feb 26, 2019·19 cites·28 claims
- 1793US8890537B2Harmonic derived arc detectorVALCORE JR JOHN·Filed 2010·Granted Nov 18, 2014·66 cites·45 claims
- 1890US10396601B2Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamberMKS INSTR INC·Filed 2017·Granted Aug 27, 2019·7 cites·34 claims
- 1989US11715624B2Adaptive pulse shaping with post match sensorMKS INSTR INC·Filed 2021·Granted Aug 1, 2023·1 cites·29 claims
- 2089US9136093B2Synchronization of RF pulsing with RF metrology, processing, and controlMKS INSTR INC·Filed 2013·Granted Sep 15, 2015·9 cites·37 claims
- 2188US6417732B1Controller for RF power generator with reduced cable length sensitivityENI TECHNOLOGY INC·Filed 2001·Granted Jul 9, 2002·43 cites·20 claims
- 2286US6778921B2Modular architecture for industrial power delivery systemENI TECHNOLOGY INC·Filed 2001·Granted Aug 17, 2004·47 cites·23 claims
- 2386US6750711B2RF power amplifier stabilityENI TECHNOLOGY INC·Filed 2001·Granted Jun 15, 2004·51 cites·52 claims
- 2485US11545943B2Switched capacitor modulatorMKS INSTR INC·Filed 2020·Granted Jan 3, 2023·2 cites·20 claims
- 2585US10930470B2Pulsed, bidirectional radio frequency source/loadMKS INSTR INC·Filed 2019·Granted Feb 23, 2021·3 cites·20 claims
- 2685US2025299922A1Adaptive Pulse Shaping with Post-Match SensorMKS INC·Filed 2025·Application pending·0 cites
- 2784US2025069853A1Apparatus and tuning method for mitigating rf load impedance variations due to periodic disturbancesMKS INSTR INC·Filed 2024·Application pending·0 cites
- 2882US12362146B2Adaptive pulse shaping with post match sensorMKS INSTR INC·Filed 2023·Granted Jul 15, 2025·0 cites·25 claims
- 2980US12183549B2Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbancesMKS INSTR INC·Filed 2022·Granted Dec 31, 2024·0 cites·26 claims
- 3080US10727027B2Adaptive periodic waveform controllerMKS INSTR INC·Filed 2019·Granted Jul 28, 2020·1 cites·23 claims
- 3179US6700092B2Pulsing intelligent RF modulation controllerENI TECHNOLOGY INC·Filed 2002·Granted Mar 2, 2004·25 cites·7 claims
- 3276US11011940B2Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamberMKS INSTR INC·Filed 2019·Granted May 18, 2021·1 cites·34 claims
- 3374US9041480B2Virtual RF sensorMKS INSTR INC·Filed 2013·Granted May 26, 2015·4 cites·20 claims
- 3474US6459067B1Pulsing intelligent RF modulation controllerENI TECHNOLOGY INC·Filed 2001·Granted Oct 1, 2002·19 cites·21 claims
- 3573US11367592B2Adaptive periodic waveform controllerMKS INSTR INC·Filed 2020·Granted Jun 21, 2022·0 cites·20 claims
- 3672US11810762B2Intermodulation distortion mitigation using electronic variable capacitorMKS INSTR INC·Filed 2021·Granted Nov 7, 2023·0 cites·17 claims
- 3771US6868310B2Predictive failure scheme for industrial thin films processing power delivery systemENI TECHNOLOGY INC·Filed 2001·Granted Mar 15, 2005·17 cites·40 claims
- 3870US12500066B2Non-invasive IED estimation for pulsed-DC and low frequency applicationsMKS INC·Filed 2023·Granted Dec 16, 2025·0 cites·37 claims
- 3968US12278090B2Enhanced tuning methods for mitigating RF load impedance variations due to periodic disturbancesMKS INSTR INC·Filed 2023·Granted Apr 15, 2025·0 cites·41 claims
- 4068US12131884B2Pulse and bias synchronization methods and systemsMKS INSTR INC·Filed 2022·Granted Oct 29, 2024·0 cites·31 claims
- 4168US12068725B2Switched capacitor modulatorMKS INSTR INC·Filed 2022·Granted Aug 20, 2024·0 cites·30 claims
- 4261US2024404788A1Pulsed RF Plasma Generator With High Dynamic RangeMKS INSTR INC·Filed 2024·Application pending·0 cites
- 4360US2025174436A1Source Tuning With Pulsed DC BiasMKS INSTR INC·Filed 2023·Application pending·0 cites
- 4456US9011633B2Broadband techniques to reduce the effects of impedance mismatch in plasma chambersBULLOCK SCOTT R·Filed 2005·Granted Apr 21, 2015·1 cites·41 claims
- 4555US2024055228A1Plasma Process Control of Multi-Electrode Systems Equipped with Ion Energy SensorsMKS INSTR INC·Filed 2022·Application pending·0 cites
- 4650US11076477B2Cooling and compression clamp for short lead power devicesMKS INSTR INC·Filed 2018·Granted Jul 27, 2021·0 cites·14 claims
- 4739US9214909B2High reliability RF generator architectureRADOMSKI AARON T·Filed 2006·Granted Dec 15, 2015·1 cites·13 claims
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