Inventor · disambiguated record
Takayuki Kawagishi
Also filed as: KAWAGISHI TAKAYUKI
6 granted patents·2 pending applications·6 citations·filing 2017–2023
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0184US10937676B2Substrate processing apparatus and device management controllerKOKUSAI ELECTRIC CORP·Filed 2018·Granted Mar 2, 2021·4 cites·11 claims
- 0274US10860005B2Substrate processing apparatus and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2017·Granted Dec 8, 2020·2 cites·11 claims
- 0362US2022019191A1Substrate processing apparatus, device management controller, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2021·Application pending·0 cites
- 0456US2023223285A1Method of manufacturing semiconductor device, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0552US11237538B2Substrate processing apparatus, device management controller, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2017·Granted Feb 1, 2022·0 cites·21 claims
- 0647US11966210B2Substrate processing apparatus, device management controller, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted Apr 23, 2024·0 cites·18 claims
- 0745US11782425B2Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2020·Granted Oct 10, 2023·0 cites·12 claims
- 0836US11086304B2Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysisHITACHI INT ELECTRIC INC·Filed 2017·Granted Aug 10, 2021·0 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →