Inventor · disambiguated record
Michael Himmelhaus
Also filed as: HIMMELHAUS MICHAEL
8 granted patents·9 pending applications·36 citations·filing 2001–2023
81Inventor score
Top patents by PatentIndex Score
17 records- 0181US8502972B2Clusters of microresonators for cavity mode optical sensingHIMMELHAUS MICHAEL·Filed 2008·Granted Aug 6, 2013·11 cites·20 claims
- 0277US8471217B2Fluorescent non-metallic particles encapsulated in a metallic coatingHIMMELHAUS MICHAEL·Filed 2007·Granted Jun 25, 2013·7 cites·24 claims
- 0372US8586142B2Method and apparatus for producing small structuresHIMMELHAUS MICHAEL·Filed 2007·Granted Nov 19, 2013·5 cites·21 claims
- 0468US6756014B2Biochemical sensor and biochemical testing system using the sameHITACHI LTD·Filed 2001·Granted Jun 29, 2004·13 cites·9 claims
- 0559US2025198927A1Method and device for the marker-free detection of an analyteFLUIDECT GMBH·Filed 2023·Application pending·0 cites
- 0649US2011149292A1Apparatus and method for analyzing optical cavity modesFUJIREBIO KK·Filed 2009·Application pending·0 cites
- 0749US2010151491A1Chemical surface nanopatterns to increase activity of surface-immobilized biomoleculesFUJIREBIO KK·Filed 2008·Application pending·0 cites
- 0848US2011256577A1Method for sensing a biochemical and/or biomechanical process of a biological material and method for analyzing biological materialsFUJIREBIO KK·Filed 2009·Application pending·0 cites
- 0948US2011253909A1Optical sensing via cavity mode excitations in the stimulated emission regimeFUJIREBIO KK·Filed 2009·Application pending·0 cites
- 1046US10429731B2Method and device for generating a reference image in the characterization of a mask for microlithographyZEISS CARL SMT GMBH·Filed 2017·Granted Oct 1, 2019·0 cites·20 claims
- 1146US2010086992A1Biosensor, biosensor chip and method for producing the biosensor chip for sensing a target moleculeFUJIREBIO KK·Filed 2007·Application pending·0 cites
- 1245US10599936B2Method for correcting the distortion of a first imaging optical unit of a first measurement systemZEISS CARL SMT GMBH·Filed 2018·Granted Mar 24, 2020·0 cites·20 claims
- 1337US2013105709A1Optical Cavity Mode Excitations in Magnetic Fluorescent MicroparticlesHIMMELHAUS MICHAEL·Filed 2011·Application pending·0 cites
- 1436US9785058B2Method for ascertaining distortion properties of an optical system in a measurement system for microlithographyZEISS CARL SMT GMBH·Filed 2015·Granted Oct 10, 2017·0 cites·10 claims
- 1536US2012126143A1Apparatus and method for operating optical microcavity by light emitting diodeHIMMELHAUS MICHAEL·Filed 2010·Application pending·0 cites
- 1630US2022156224A1Apparatus for the spectroscopic determination of the binding kinetics of an analyteSURFLAY NANOTEC GMBH·Filed 2020·Application pending·0 cites
- 1725US8288166B2Sensor chip with connected non-metallic particles comprising a metallic coatingDAHINT REINER·Filed 2006·Granted Oct 16, 2012·0 cites·18 claims
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